Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5605600 | Etch profile shaping through wafer temperature control | Karl Paul Muller, Bernhard Poschenrieder, Toru Watanabe | 1997-02-25 |
| 5592412 | Enhanced deep trench storage node capacitance for DRAM | Richard L. Kleinhenz, Karl Paul Muller, Masakatsu Tuschiaki | 1997-01-07 |