Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5648195 | Radiation-sensitive resist composition comprising a diazoketone | Michael Sebald, Siegfried Birkle, Hans Jurgen Bestmann | 1997-07-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5648195 | Radiation-sensitive resist composition comprising a diazoketone | Michael Sebald, Siegfried Birkle, Hans Jurgen Bestmann | 1997-07-15 |