Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5703186 | Mixed polymers | Recai Sezi, Horst Borndoerfer, Hellmut Ahne, Siegfried Birkle, Eberhard Kuehn +2 more | 1997-12-30 |
| 5648195 | Radiation-sensitive resist composition comprising a diazoketone | Siegfried Birkle, Karin Preissner, Hans Jurgen Bestmann | 1997-07-15 |
| 5616667 | Copolymers | Recai Sezi, Horst Borndoerfer, Hellmut Ahne, Siegfried Birkle, Eberhard Kuehn +2 more | 1997-04-01 |