Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5673785 | Micromechanical relay | Joachim Schimkat | 1997-10-07 |
| 5666258 | Micromechanical relay having a hybrid drive | Hans-Jurgen Gevatter, Lothar Kiesewetter, Joachim Schimkat | 1997-09-09 |
| 5635750 | Micromechanical relay with transverse slots | Joachim Schimkat | 1997-06-03 |
| 5629565 | Micromechanical electrostatic relay with geometric discontinuity | Hans-Juergen Gevattter, Lothar Kiesewetter, Joachim Schimkat | 1997-05-13 |
| 5623102 | Three wafer semiconductor pressure-difference sensor and method for manufacture separating middle wafer into conducting diaphragm and web | Frank Arndt, Detlef Houdeau, Moritz von Rauch | 1997-04-22 |