Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5623102 | Three wafer semiconductor pressure-difference sensor and method for manufacture separating middle wafer into conducting diaphragm and web | Frank Arndt, Moritz von Rauch, Helmut Schlaak | 1997-04-22 |