TF

Tomoyoshi Furihata

SC Shin-Etsu Chemical Co.: 2 patents #44 of 182Top 25%
Overall (1997): #21,552 of 185,788Top 15%
2
Patents 1997

Issued Patents 1997

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
5668226 2,4-diamino-s-triazinyl group-containing polymer and negative radiation-sensitive resist composition containing the same Motoyuki Yamada 1997-09-16
5618892 2,4-diamino-s-triazinyl group-containing polymer and negative radiation-sensitive resist composition containing the same Motoyuki Yamada 1997-04-08