Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5668226 | 2,4-diamino-s-triazinyl group-containing polymer and negative radiation-sensitive resist composition containing the same | Tomoyoshi Furihata | 1997-09-16 |
| 5618892 | 2,4-diamino-s-triazinyl group-containing polymer and negative radiation-sensitive resist composition containing the same | Tomoyoshi Furihata | 1997-04-08 |