Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5654203 | Method for manufacturing a thin film transistor using catalyst elements to promote crystallization | Hisashi Ohtani, Hiroki Adachi, Toru Takayama | 1997-08-05 |
| 5643826 | Method for manufacturing a semiconductor device | Hisashi Ohtani, Takeshi Fukunaga, Hongyong Zhang | 1997-07-01 |
| 5626922 | Plasma processing method | Tohru Inoue, Shunpei Yamazaki | 1997-05-06 |
| 5612250 | Method for manufacturing a semiconductor device using a catalyst | Hisashi Ohtani, Hongyong Zhang, Naoaki Yamaguchi, Atsunori Suzuki | 1997-03-18 |
| 5605846 | Method for manufacturing semiconductor device | Hisahi Ohtani, Hongyong Zhang, Naoaki Yamaguchi | 1997-02-25 |
| 5604360 | Semiconductor device including a plurality of thin film transistors at least some of which have a crystalline silicon film crystal-grown substantially in parallel to the surface of a substrate for the transistor | Hongyong Zhang, Toru Takayama, Yasuhiko Takemura | 1997-02-18 |