Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5700626 | Method for forming multi-layer resist pattern | Hun Hur, Young Jin SONG | 1997-12-23 |
| 5637425 | Method for fabricating phase shift mask comprising a polymethylmethacrylate phase shift film | Suk-Bin Han | 1997-06-10 |
| 5609994 | Method for patterning photoresist film having a stepwise thermal treatment | — | 1997-03-11 |