Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5673713 | Apparatus for cleansing semiconductor wafer | — | 1997-10-07 |
| 5637425 | Method for fabricating phase shift mask comprising a polymethylmethacrylate phase shift film | Jun Seok Lee | 1997-06-10 |
| 5622636 | Etch-ending point measuring method for wet-etch process | Yun Jun Huh, Sang-jin Choi | 1997-04-22 |