Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5616523 | Method of manufacturing sensor | Gerhard Benz, Jiri Marek, Frank Bantien, Horst Muenzel, Franz Laermer +1 more | 1997-04-01 |
| 5595940 | Method of producing micromechanical structures | Hans-Peter Trah, Franz Laermer | 1997-01-21 |