Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5681398 | Silicone wafer cleaning method | — | 1997-10-28 |
| 5643404 | Method for examination of silicon wafer surface defects | Yuji Fukazawa | 1997-07-01 |
| 5635463 | Silicon wafer cleaning fluid with HN0.sub.3, HF, HCl, surfactant, and water | — | 1997-06-03 |
| 5636256 | Apparatus used for total reflection fluorescent X-ray analysis on a liquid drop-like sample containing very small amounts of impurities | Tuyoshi Matumura, Kunihiro Miyazaki | 1997-06-03 |