Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5650630 | Mercury vapor high-pressure discharge lamp and irradiation method, particularly for mask pattern exposure of semiconductor wafers | Juergen Maier | 1997-07-22 |
| 5608227 | Mercury-vapor high-pressure short-arc discharge lamp, and method and apparatus for exposure of semiconductor wafers to radiation emitted from said lamp | Juergen Maier | 1997-03-04 |