Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5650630 | Mercury vapor high-pressure discharge lamp and irradiation method, particularly for mask pattern exposure of semiconductor wafers | Joern Dierks | 1997-07-22 |
| 5629585 | High-pressure discharge lamp, particularly low-rated power discharge lamp, with enhanced quality of light output | Bernhard Altmann, Juergen Begemann, Andreas Ponnier, Ralf Seedorf | 1997-05-13 |
| 5608227 | Mercury-vapor high-pressure short-arc discharge lamp, and method and apparatus for exposure of semiconductor wafers to radiation emitted from said lamp | Joern Dierks | 1997-03-04 |