Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5692947 | Linear polisher and method for semiconductor wafer planarization | David E. Weldon | 1997-12-02 |
| 5650039 | Chemical mechanical polishing apparatus with improved slurry distribution | — | 1997-07-22 |
| 5593344 | Wafer polishing machine with fluid bearings and drive systems | David E. Weldon, Boguslaw Nagorski | 1997-01-14 |