Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5692947 | Linear polisher and method for semiconductor wafer planarization | Homayoun Talieh | 1997-12-02 |
| 5593344 | Wafer polishing machine with fluid bearings and drive systems | Boguslaw Nagorski, Homayoun Talieh | 1997-01-14 |