Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5700602 | Method and apparatus for precision determination of phase-shift in a phase-shifted reticle | Giang T. Dao, Nelson Tam, Jeffrey N. Farnsworth | 1997-12-23 |
| 5618643 | Embedded phase shifting mask with improved relative attenuated film transmission | Giang T. Dao | 1997-04-08 |