Issued Patents 1997
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5700602 | Method and apparatus for precision determination of phase-shift in a phase-shifted reticle | Nelson Tam, Gang Kevin Liu, Jeffrey N. Farnsworth | 1997-12-23 |
| 5688409 | Processes for fabricating device layers with ultrafine features | Joseph C. Langston | 1997-11-18 |
| 5635316 | Layout methodology, mask set, and patterning method for phase-shifting lithography | — | 1997-06-03 |
| 5633102 | Lithography using a new phase-shifting reticle | Kenny K. Toh, Eng T. Gaw, Rajeev Ranjan Singh | 1997-05-27 |
| 5620816 | Layout methodology, mask set, and patterning method for phase-shifting lithography | — | 1997-04-15 |
| 5618643 | Embedded phase shifting mask with improved relative attenuated film transmission | Gang Kevin Liu | 1997-04-08 |
| 5595843 | Layout methodology, mask set, and patterning method for phase-shifting lithography | — | 1997-01-21 |