Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5700604 | Charged particle beam exposure method and mask employed therefor | — | 1997-12-23 |
| 5624774 | Method for transferring patterns with charged particle beam | Mamoru Nakasuji | 1997-04-29 |