Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5689117 | Apparatus for image transfer with charged particle beam, and deflector and mask used with such apparatus | — | 1997-11-18 |
| 5629526 | Electro-magnetic lens, charged particle beam transferring apparatus, and method for manufacturing electro-magnetic lens | — | 1997-05-13 |
| 5624774 | Method for transferring patterns with charged particle beam | Teruaki Okino | 1997-04-29 |