Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5683606 | Ceramic heaters and heating devices using such ceramic heaters | Atsushi Sakon, Koichi Umemoto, Yusuke Niiori | 1997-11-04 |
| 5616024 | Apparatuses for heating semiconductor wafers, ceramic heaters and a process for manufacturing the same, a process for manufacturing ceramic articles | Kazuhiro Nobori, Koichi Umemoto, Atsushi Sakon, Yusuke Niiori, Masahiro Murasato | 1997-04-01 |