Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5616024 | Apparatuses for heating semiconductor wafers, ceramic heaters and a process for manufacturing the same, a process for manufacturing ceramic articles | Kazuhiro Nobori, Ryusuke Ushikoshi, Koichi Umemoto, Atsushi Sakon, Yusuke Niiori | 1997-04-01 |