Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677824 | Electrostatic chuck with mechanism for lifting up the peripheral of a substrate | Keiichi Harashima | 1997-10-14 |
| 5668053 | Method for fabricating multilayer semiconductor device | — | 1997-09-16 |
| 5647912 | Plasma processing apparatus | Takahiro Kaminishizono | 1997-07-15 |
| 5639309 | Plasma processing apparatus adjusted for a batch-processing of a plurality of wafers with plasma gases | — | 1997-06-17 |
| 5614025 | Plasma processing apparatus | — | 1997-03-25 |