Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677824 | Electrostatic chuck with mechanism for lifting up the peripheral of a substrate | Takeshi Akimoto | 1997-10-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677824 | Electrostatic chuck with mechanism for lifting up the peripheral of a substrate | Takeshi Akimoto | 1997-10-14 |