Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5674352 | Process related to a modified polishing pad for polishing | Chris C. Yu | 1997-10-07 |
| 5628862 | Polishing pad for chemical-mechanical polishing of a semiconductor substrate | Chris C. Yu | 1997-05-13 |