Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702849 | Mask for transferring a pattern for use in a semiconductor device and method of manufacturing the same | Hirofumi Sakata | 1997-12-30 |
| 5688723 | Method of forming fine patterns | Chikayuki Okamoto, Satoru Kawazu | 1997-11-18 |
| 5656809 | Atomic force microscope and measuring head thereof with linearly polarized reflected light | Norihisa Miyashita | 1997-08-12 |
| 5652428 | Method of using scanning probe microscope allowing cleaning of probe tip in ambient atmosphere | Takao Yasue | 1997-07-29 |
| 5622787 | Mask for transferring a pattern for use in a semiconductor device and method of manufacturing the same | Hirofumi Sakata | 1997-04-22 |
| 5595941 | Method of forming fine patterns | Chikayuki Okamoto, Satoru Kawazu | 1997-01-21 |