Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5618461 | Reflectance method for accurate process calibration in semiconductor wafer heat treatment | Robert Burke, Russell C. Zahorik, Randhir P. S. Thakur | 1997-04-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5618461 | Reflectance method for accurate process calibration in semiconductor wafer heat treatment | Robert Burke, Russell C. Zahorik, Randhir P. S. Thakur | 1997-04-08 |