Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5698455 | Method for predicting process characteristics of polyurethane pads | Scott Meikle | 1997-12-16 |
| 5679169 | Method for post chemical-mechanical planarization cleaning of semiconductor wafers | David Gonzales | 1997-10-21 |
| 5650619 | Quality control method for detecting defective polishing pads used in chemical-mechanical planarization of semiconductor wafers | — | 1997-07-22 |