Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5695815 | Metal carboxylate complexes for formation of metal-containing films on semiconductor devices | — | 1997-12-09 |
| 5679815 | Tantalum and niobium reagents useful in chemical vapor deposition processes, and process for depositing coatings using the same | Peter S. Kirlin, Douglas Gordon, Timothy E. Glassman | 1997-10-21 |
| 5677002 | Chemical vapor deposition of tantalum- or niobium-containing coatings | Peter S. Kirlin, Douglas Gordon, Timothy E. Glassman | 1997-10-14 |
| 5659057 | Five- and six-coordinate precursors for titanium nitride deposition | — | 1997-08-19 |
| 5635022 | Silicon oxide removal in semiconductor processing | — | 1997-06-03 |
| 5607722 | Process for titanium nitride deposition using five-and six-coordinate titanium complexes | Wing-Cheong Gilbert Lai | 1997-03-04 |