Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679815 | Tantalum and niobium reagents useful in chemical vapor deposition processes, and process for depositing coatings using the same | Peter S. Kirlin, Brian A. Vaartstra, Timothy E. Glassman | 1997-10-21 |
| 5677002 | Chemical vapor deposition of tantalum- or niobium-containing coatings | Peter S. Kirlin, Brian A. Vaartstra, Timothy E. Glassman | 1997-10-14 |