Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5635244 | Method of forming a layer of material on a wafer | Wilbur G. Catabay, Joe W. Zhao | 1997-06-03 |
| 5614249 | Leak detection system for a gas manifold of a chemical vapor deposition apparatus | — | 1997-03-25 |