Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5660682 | Plasma clean with hydrogen gas | Zhihai Wang, Wilbur G. Catabay | 1997-08-26 |
| 5635244 | Method of forming a layer of material on a wafer | Mark Mayeda, Wilbur G. Catabay | 1997-06-03 |