Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5647953 | Plasma cleaning method for removing residues in a plasma process chamber | David R. Pirkle, William Harshbarger, Timothy M. Ebel | 1997-07-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5647953 | Plasma cleaning method for removing residues in a plasma process chamber | David R. Pirkle, William Harshbarger, Timothy M. Ebel | 1997-07-15 |