Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5647953 | Plasma cleaning method for removing residues in a plasma process chamber | Larry Williams, David R. Pirkle, Timothy M. Ebel | 1997-07-15 |
WH
William Harshbarger
Overall (1997): #60,063 of 185,788Top 35%
1
Patents 1997