Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5632820 | Thermal treatment furnace in a system for manufacturing semiconductors | Tomoshi Taniyama, Hideki Kaihotsu, Kazuhito Ikeda, Shuji Yonemitsu | 1997-05-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5632820 | Thermal treatment furnace in a system for manufacturing semiconductors | Tomoshi Taniyama, Hideki Kaihotsu, Kazuhito Ikeda, Shuji Yonemitsu | 1997-05-27 |