Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5669644 | Wafer transfer plate | Kazuhiro Shimeno, Kouji Tometsuka | 1997-09-23 |
| 5632820 | Thermal treatment furnace in a system for manufacturing semiconductors | Tomoshi Taniyama, Yoshikatsu Kanamori, Kazuhito Ikeda, Shuji Yonemitsu | 1997-05-27 |