Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679495 | Radiation sensitive resin composition | Mikio Yamachika, Toshiyuki Ota, Akira Tsuji | 1997-10-21 |
| 5629135 | Chemically amplified resist composition | Makoto Murata, Toshiyuki Ota, Akira Tsuji | 1997-05-13 |