Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679495 | Radiation sensitive resin composition | Mikio Yamachika, Eiichi Kobayashi, Akira Tsuji | 1997-10-21 |
| 5672459 | Radiation sensitive resin composition containing quinone diazide ester having two hindered phenol groups | Katsumi Inomata, Masahiro Akiyama, Akira Tsuji | 1997-09-30 |
| 5629135 | Chemically amplified resist composition | Eiichi Kobayashi, Makoto Murata, Akira Tsuji | 1997-05-13 |