Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5642196 | Method and apparatus for measuring the thickness of a film using low coherence reflectometry | Ronald V. Alves, Wayne V. Sorin | 1997-06-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5642196 | Method and apparatus for measuring the thickness of a film using low coherence reflectometry | Ronald V. Alves, Wayne V. Sorin | 1997-06-24 |