Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5625217 | MOS transistor having a composite gate electrode and method of fabrication | Robert S. Chau, David B. Fraser, Kenneth Cadien, Gopal Raghavan | 1997-04-29 |
| 5611943 | Method and apparatus for conditioning of chemical-mechanical polishing pads | Kenneth Cadien | 1997-03-18 |
| 5595526 | Method and apparatus for endpoint detection in a chemical/mechanical process for polishing a substrate | Paul B. Fischer | 1997-01-21 |