Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5700383 | Slurries and methods for chemical mechanical polish of aluminum and titanium aluminide | A. Feller | 1997-12-23 |
| 5625217 | MOS transistor having a composite gate electrode and method of fabrication | Robert S. Chau, David B. Fraser, Gopal Raghavan, Leopoldo D. Yau | 1997-04-29 |
| 5611943 | Method and apparatus for conditioning of chemical-mechanical polishing pads | Leopoldo D. Yau | 1997-03-18 |
| 5604158 | Integrated tungsten/tungsten silicide plug process | Srinivasam Sivaram | 1997-02-18 |