Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5680588 | Method and system for optimizing illumination in an optical photolithography projection imaging system | Alan E. Rosenbluth | 1997-10-21 |
| 5668018 | Method for defining a region on a wall of a semiconductor structure | John Cronin | 1997-09-16 |
| 5614990 | Illumination tailoring system using photochromic filter | James A. Bruce, Michael S. Hibbs | 1997-03-25 |