Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658418 | Apparatus for monitoring the dry etching of a dielectric film to a given thickness in an integrated circuit | Philippe Coronel | 1997-08-19 |
| 5648849 | Method of and device for in situ real time quantification of the morphology and thickness of a localized area of a surface layer of a thin layer structure during treatment of the latter | Jacky Mathias | 1997-07-15 |