Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658418 | Apparatus for monitoring the dry etching of a dielectric film to a given thickness in an integrated circuit | Jean Canteloup | 1997-08-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658418 | Apparatus for monitoring the dry etching of a dielectric film to a given thickness in an integrated circuit | Jean Canteloup | 1997-08-19 |