Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5607509 | High impedance plasma ion implantation apparatus | Jesse N. Matossian, Dan M. Goebel | 1997-03-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5607509 | High impedance plasma ion implantation apparatus | Jesse N. Matossian, Dan M. Goebel | 1997-03-04 |