Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5694005 | Plasma-and-magnetic field-assisted, high-power microwave source and method | — | 1997-12-02 |
| 5668442 | Plasma-assisted tube with helical slow-wave structure | Jennifer M. Butler, Robert L. Eisenhart | 1997-09-16 |
| 5663694 | Triggered-plasma microwave switch and method | Joseph Santoru, Robert L. Poeschel, John W. Gerstenberg | 1997-09-02 |
| 5656141 | Apparatus for coating substrates | Hans-Georg Betz, Gregor A. Campbell, Robert W. Conn, Karl Matl, Peter Sommerkamp +1 more | 1997-08-12 |
| 5607509 | High impedance plasma ion implantation apparatus | Robert W. Schumacher, Jesse N. Matossian | 1997-03-04 |
| 5608297 | Plasma switch and switching method with fault current interruption | — | 1997-03-04 |