Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5684565 | Pattern detecting method, pattern detecting apparatus, projection exposing apparatus using the same and exposure system | Hisafumi Iwata, Yasuhiro Yoshitake, Minoru Yoshida, Yukihiro Shibata | 1997-11-04 |
| 5677755 | Method and apparatus for pattern exposure, mask used therefor, and semiconductor integrated circuit produced by using them | Yasuhiko Nakayama, Masahiro Watanabe, Minoru Yoshida, Kenichirou Fukuda | 1997-10-14 |