Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677755 | Method and apparatus for pattern exposure, mask used therefor, and semiconductor integrated circuit produced by using them | Yoshitada Oshida, Yasuhiko Nakayama, Masahiro Watanabe, Minoru Yoshida | 1997-10-14 |