Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5663502 | Method and apparatus for measuring thickness of layer using acoustic waves | Yoshiaki Nagashima, Kenichi Fujiwara, Masao Sato, Fuminobu Takahashi, Hajime Umehara +1 more | 1997-09-02 |