Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5699282 | Methods and test structures for measuring overlay in multilayer devices | Richard A. Allen | 1997-12-16 |
| 5684301 | Monocrystalline test structures, and use for calibrating instruments | R. N. Ghoshtagore, Loren W. Linholm, Richard A. Allen, Jeffry J. Sniegowski | 1997-11-04 |
| 5617340 | Method and reference standards for measuring overlay in multilayer structures, and for calibrating imaging equipment as used in semiconductor manufacturing | Richard A. Allen, Joseph J. Kopanski, Loren W. Linholm | 1997-04-01 |
| 5602492 | Electrical test structure and method for measuring the relative locations of conducting features on an insulating substrate | Loren W. Linholm, Richard A. Allen, E. Clayton Teague, William B. Penzes | 1997-02-11 |